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Huawei patents EUV lithography tools used to make <10nm chips

December 26, 2022
Source: techspot.com techspot.com
News Snapshot:
In context: Lithography machines are some of the most complex and expensive used in chip manufacturing. They generate steady beams of light in the ultraviolet spectrum and filter that light until it resembles the inverse of the floorplan of a microprocessor. They focus and point the light at a photosensitive wafer with a degree of precision in the tens of nanometers to carve out the floorplan. Huawei has patented one component used in EUV lithography systems that is required to make high-end processors on sub-10 nm nodes. It solves the problem of interference patterns created by the ultraviolet light that...
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