Varian Semiconductor Equipment Associates, Inc. announced today that it has shipped single wafer VIISta 80HP high current and VIISta 810EHP medium current ion implanters to a 300mm fab in China.

This shipment is the first in a series of ion implanter orders that will ship in the next two quarters to this customer's fabs in China. The VIISta platform of ion implanters is the only single wafer platform solution for all production applications available. All of the VIISta products feature the Varian Control System (VCS), the Varian Positioning Systems (VPS) and a common single wafer endstation.


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