Tegal Corporation today announced the sale of multiple 903e plasma etch systems to a manufacturer of components for telecommunications and consumer applications in Shanghai.

The tools will join a significant number of 900 series systems already installed at this location and be used in the manufacture of a variety of devices. Tegal expects to install the systems beginning in July 2004. 900 Series systems deliver highly reliable, repeatable results in etching a variety of films used to manufacture MEMS, silicon ICs, telecommunications and optoelectronics devices, flat panel displays and thin film magnetic heads.